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Functional Nanostructures and Nanoelectronics Lab. (FNNL)

Equipment

Equipment

Chalcogen chamber

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Drying oven

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High T oven

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Hood system

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KrF excimer laser

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Laser power meter

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Main chamber

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OM with CCD camera

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Oxide chamber

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PEC measurement system

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Probe station

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RF sputter

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RO purification system

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Spin coater

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Spray coater

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Tube furnace

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UV-Ozone treatment

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